The Solaris 100 is a low cost, small footprint
Rapid Thermal Processing system designed
for research applications and processing
samples up to 4" in diameter. The advanced
temperature measurement technique and state
of the art signal conditioners allow the PID
graphical software controller to maintain
stable and repeatable temperatures through a
wide process application base. The system is
provided with a the latest pentuim PC with
Windows compatible software for editing
recipes and process data logging.
The Solaris 100 utilizes 13 quartz halogen
lamps on top and bottom of the wafer to
reduce non-uniform heating from pattern
effects seen on single sided RTA systems.
The high-purity quartz wafer holder and
chamber is manufactured out of
semiconductor grade low OH quartz to
eliminate metallic contamination.
The oven contains gold reflectors for fast
heating rates and long lamp lifetimes.
A SiC coated graphite susceptor is available
for processing compound semiconductor
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Solaris 100 Rapid Thermal Processing System