The Solaris 150UV is a standalone unit or an added option for the
Solaris 150 RTP System.
Applications Include:
-Pre Gate Oxidation Cleaning
-Pre-Epi Cleaning
-Photoresist Descum
-Growth of Sacrificial Oxides
-Bond Pad Cleaning
-Cleaning of Critical Surfaces
-Hydrocarbon Removal
-High Temperature UV/Ozone Densification
-Hardened Resist Etch Rates>25-50 A/min at room temperature
Solaris 150 RTP System.
Applications Include:
-Pre Gate Oxidation Cleaning
-Pre-Epi Cleaning
-Photoresist Descum
-Growth of Sacrificial Oxides
-Bond Pad Cleaning
-Cleaning of Critical Surfaces
-Hydrocarbon Removal
-High Temperature UV/Ozone Densification
-Hardened Resist Etch Rates>25-50 A/min at room temperature
Rapid Thermal Annealing Heatpulse Ag Associates Rapid Thermal Processing Rapid Thermal Anneal RTP RTA
Annealsys Jipelic MPT 600s wafer ID wafer marking
Annealsys Jipelic MPT 600s wafer ID wafer marking
Processed Silicon Wafer
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